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Improvement of carbon depth profiling within shallow structures by secondary ion mass spectrometry (SIMS)
Publication:
Improvement of carbon depth profiling within shallow structures by secondary ion mass spectrometry (SIMS)
Date
2026
Journal article
https://doi.org/10.1016/j.vacuum.2025.114893
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Merkulov, Alex
;
Franquet, Alexis
;
Tilmann, Rita
Journal
VACUUM
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21
since deposited on 2025-12-01
Acq. date: 2025-12-04
Citations
Metrics
Views
21
since deposited on 2025-12-01
Acq. date: 2025-12-04
Citations