Publication:
Leakage and TDDB Mechanisms in 18 nm Pitch Direct Metal Etch Ru Interconnects with Airgaps
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20 since deposited on 2025-12-10
Acq. date: 2026-09-20
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Statistics
Views
20 since deposited on 2025-12-10
Acq. date: 2026-09-20
Citations