Publication:

Leakage and TDDB Mechanisms in 18 nm Pitch Direct Metal Etch Ru Interconnects with Airgaps

Date

2025-01-01

Proceedings Paper

https://doi.org/10.1109/IRPS48204.2025.10982715

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Author(s)

Lesniewska, Alicja

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Roussel, Philippe

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Van Sever, Koen

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Chery, Emmanuel

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Varela Pedreira, Olalla

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Journal

2025 IEEE INTERNATIONAL RELIABILITY PHYSICS SYMPOSIUM, IRPS

Metrics

8 since deposited on 2025-12-10

Acq. date: 2025-12-13