Publication:

Stabilization of amorphous structures in ALCVD high-k oxide layers

Date

2001
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Author(s)

Zhao, Chao
;
Richard, Olivier  
;
Bender, Hugo  
;
Young, Edward
;
Carter, Richard
;
Tsai, Wilman
;
Caymax, Matty  
;
De Gendt, Stefan  
;
Heyns, Marc  
;
Roebben, G.
;
Van der Biest, O.
;
Maes, Jos
;
Tuominen, Marko
;
Haukka, S.

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