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Stabilization of amorphous structures in ALCVD high-k oxide layers

dc.contributor.authorZhao, Chao
dc.contributor.authorRichard, Olivier
dc.contributor.authorBender, Hugo
dc.contributor.authorYoung, Edward
dc.contributor.authorCarter, Richard
dc.contributor.authorTsai, Wilman
dc.contributor.authorCaymax, Matty
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.contributor.authorRoebben, G.
dc.contributor.authorVan der Biest, O.
dc.contributor.authorMaes, Jos
dc.contributor.authorTuominen, Marko
dc.contributor.authorHaukka, S.
dc.date.accessioned2021-10-14T18:32:48Z
dc.date.available2021-10-14T18:32:48Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5877
dc.sourceIIOimport
dc.titleStabilization of amorphous structures in ALCVD high-k oxide layers
dc.typeOral presentation
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.source.peerreviewno
dc.source.conferenceIUVSTA 15th International Vacuum Congress (IVC-15), AVS 48th International Symposium (AVS-48), 11th International Conference on
dc.source.conferencelocation
imec.availabilityPublished - imec


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