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Linear arrays of poly Si-Ge uncooled microbolometers with CMOS readout as long wavelength infrared sensors
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Authors
Kavadias, Spyros
;
De Moor, Piet
;
Gastal, Martin
;
Van Hoof, Chris
Conference
Microelectronics, Microsystems and Nanotechnology. Papers presented at MMN 2000
Title
Linear arrays of poly Si-Ge uncooled microbolometers with CMOS readout as long wavelength infrared sensors
Publication type
Proceedings paper
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