Publication:

Enabling Curvilinear Masks: Novel Mask Qualification Methodology and Experimental Verification

Date

2025
Proceedings Paper
https://doi.org/10.1117/12.3072276
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Author(s)

Trivkovic, Darko  
;
Jang, Il-Yong
;
Meusemann, Stefan
;
Wang, Xiaolong
;
Shi, Xuelong  
;
Meng, Renyang  
;
Chang, Chieh-Miao
;
Bender, Markus
;
Frangend, Andreas
;
Wang, Jane  
;
Malacara, Victoria  
;
Baskaran, Balakumar  
;
Bekaert, Joost  

Journal

PHOTOMASK TECHNOLOGY 2025

Abstract

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2 since deposited on 2026-03-31
Acq. date: 2026-04-06

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2 since deposited on 2026-03-31
Acq. date: 2026-04-06

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