Enabling Curvilinear Masks: Novel Mask Qualification Methodology and Experimental Verification

Trivkovic, Darko; Jang, Il-Yong; Meusemann, Stefan; Wang, Xiaolong; Shi, Xuelong; Meng, Renyang; Chang, Chieh-Miao; Bender, Markus; Frangend, Andreas; Wang, Jane; Malacara, Victoria; Baskaran, Balakumar; Bekaert, Joost

doi:10.1117/12.3072276

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Enabling Curvilinear Masks: Novel Mask Qualification Methodology and Experimental Verification

Date

2025

Proceedings Paper

https://doi.org/10.1117/12.3072276

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PHOTOMASK TECHNOLOGY 2025

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Acq. date: 2026-10-04

Enabling Curvilinear Masks: Novel Mask Qualification Methodology and Experimental Verification

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