Publication:
Tuning, Modelling, and Verifying Effects of Intermixing on EUV Multilayer Mirror Performance via a Combined Simulation and Experimental Approach
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2 since deposited on 2026-03-31
Acq. date: 2026-04-06
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Views
2 since deposited on 2026-03-31
Acq. date: 2026-04-06
Citations