Radiation damage in shallow trench isolation diodes

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Authors
Hayama, K.; Ohyama, H.; Miura, T.; Poyai, Amporn; Simoen, Eddy; Claeys, Cor; Kobayashi, K.
Conference
Proceedings of the International Conference on Electrical Engineering - ICEE
Title
Radiation damage in shallow trench isolation diodes
Publication type
Proceedings paper
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