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Radiation damage in shallow trench isolation diodes

dc.contributor.authorHayama, K.
dc.contributor.authorOhyama, H.
dc.contributor.authorMiura, T.
dc.contributor.authorPoyai, Amporn
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.contributor.authorKobayashi, K.
dc.date.accessioned2021-10-14T18:40:20Z
dc.date.available2021-10-14T18:40:20Z
dc.date.issued2001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5914
dc.sourceIIOimport
dc.titleRadiation damage in shallow trench isolation diodes
dc.typeProceedings paper
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.beginpage1720
dc.source.endpage1723
dc.source.conferenceProceedings of the International Conference on Electrical Engineering - ICEE
dc.source.conferencedate22/07/2001
dc.source.conferencelocationXi'an China
imec.availabilityPublished - imec


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