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Controlling STI-related parasitic conduction in 90nm CMOS and below

dc.contributor.authorAugendre, Emmanuel
dc.contributor.authorRooyackers, Rita
dc.contributor.authorShamiryan, Denis
dc.contributor.authorRavit, Claire
dc.contributor.authorJurczak, Gosia
dc.contributor.authorBadenes, Gonçal
dc.date.accessioned2021-10-14T21:07:30Z
dc.date.available2021-10-14T21:07:30Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/5970
dc.sourceIIOimport
dc.titleControlling STI-related parasitic conduction in 90nm CMOS and below
dc.typeProceedings paper
dc.contributor.imecauthorJurczak, Gosia
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage507
dc.source.endpage510
dc.source.conferenceESSDERC - 32nd European Solid-State Device Research Conference
dc.source.conferencedate24/09/2002
dc.source.conferencelocationFirenze Italy
imec.availabilityPublished - open access


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