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Residual stresses in tungsten lines: analysis of experimental (micro-Raman spectroscopy, XRD) and numerical results
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Authors
De Wolf, Ingrid
;
Maes, Herman
;
Moffet, J.
;
Ignat, M.
Conference
Materials Reliability in Microelectronics V
Title
Residual stresses in tungsten lines: analysis of experimental (micro-Raman spectroscopy, XRD) and numerical results
Publication type
Proceedings paper
Embargo date
9999-12-31
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