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Stress variation across arrays of lines and its influence on LOCOS oxidation
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Authors
De Wolf, Ingrid
;
Rooyackers, Rita
;
Maes, Herman
Issue
1_4
Journal
Microelectronic Engineering
Volume
28
Title
Stress variation across arrays of lines and its influence on LOCOS oxidation
Publication type
Journal article
Embargo date
9999-12-31
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