Browsing Presentations by imec author "0b668b87fb95a91245e64575f214fdff89ad3bac"
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Contact hole multiplication using grapho-epitaxy directed self-assembly: process choices, template optimization, and placement accuracy
Bekaert, Joost; Doise, Jan; MKuppuswamy, Vijaya Kumar; Chan, BT; Gronheid, Roel; Vandenberghe, Geert; Cao, Yi; Her, YoungJun (2014) -
Contact hole multiplication using grapho-epitaxy directed self-assembly: process choices, template optimization, and placement accuracy
Bekaert, Joost; Gronheid, Roel; MKuppuswamy, Vijaya Kumar; Doise, Jan; Chan, BT; Vandenberghe, Geert; Sayan, Safak; Cao, Yi; Her, YoungJun (2014) -
N7 Logic via patterning using templated DSA - implementation aspects
Bekaert, Joost; Doise, Jan; Chan, BT; Gronheid, Roel; Ryckaert, Julien; Vandenberghe, Geert; Her, YoungJun; Cao, Yi (2015)