Browsing Presentations by author "Baeyens, Martien"
Now showing items 1-5 of 5
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Evaluation of cleaning recipes based on ozonated water for pre-gate oxide cleaning
Jeon, J. S.; Ogle, B.; Baeyens, Martien; Mertens, Paul (1998) -
Gas-phase surface proessing prior to 3.2nm gate oxidation
Ruzyllo, Jerzy; Röhr, Erika; Baeyens, Martien; Bearda, Twan; Mertens, Paul; Heyns, Marc (1998) -
Hydrogen peroxide decomposition in ammonin solutions
Knotter, D. M.; De Gendt, Stefan; Baeyens, Martien; Mertens, Paul; Heyns, Marc (1998) -
Role of UV/chlorine exposure during dry surface conditioning before integrated epi deposition process
Ruzyllo, Jerzy; Röhr, Erika; Baeyens, Martien; Conard, Thierry; Mertens, Paul; Heyns, Marc (1998) -
Single step alkaline cleaning solution for advanced semiconductor cleaning
Baeyens, Martien; Hub, W.; Kolbesen, B. O.; Martin, A.R.; Mertens, Paul (1998)