Browsing Presentations by author "Nagar, Magi"

Now showing items 1-2 of 2

Elucidating advanced inhibitor material in Copper CMP: K-sorbate as an inhibitor in Copper CMP slurry

Nagar, Magi; Vaes, Jan; Ein Eli, Yair (2008)
K-sorbate as a passivator in copper chemical mechanical planarization (CMP) slurries

Nagar, Magi; Vaes, Jan; Ein Eli, Yair (2008)