Browsing Presentations by author "Gangala, Hareen K"
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CD control using SiON BARL processing for sub 0.25µm lithography
Zhang, Fenghong; Op de Beeck, Maaike; Ronse, Kurt; Gangala, Hareen K; Gopalan, P.; Conley, P.; Dusa, M.; Bendik, Joe (1998) -
Lithography simulation with aerial image-variable threshold resist model
Randall, John; Gangala, Hareen K; Tritchkov, Alexander (1998)