Browsing Presentations by imec author "6ecdf26eec22e17d1770ee63c65e852686ecb14e"
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Evaluation of Mn-based Cu barriers for interconnect applications
Van Besien, Els; Jourdan, Nicolas; Zhao, Larry; Croes, Kristof; Siew, Yong Kong; Van Elshocht, Sven; Tokei, Zsolt (2011) -
The influence of N containing plasmas on low-k films
Verdonck, Patrick; Aresti, Maitane; Ferchichi, Abdelkarim; Van Besien, Els; Stafford, Ben; De Roest, David; Baklanov, Mikhaïl (2010)