Browsing Presentations by imec author "706823dc8e110fc1cff9b5c8953d06eac638f6ab"
Now showing items 1-2 of 2
-
III/V Nano-ridge engineering for device integration on 300 mm silicon
Kunert, Bernardette; Colucci, Davide; Baryshnikova, Marina; Mols, Yves; Alcotte, Reynald; Van Thourhout, Dries; Ozdemir, Cenk Ibrahim; De Koninck, Yannick; Kuznetsova, Nadezda; Yudistira, Didit; Pantouvaki, Marianna; Van Campenhout, Joris; Vais, Abhitosh; Yadav, Sachin; Sibaja-Hernandez, Arturo; Parvais, Bertrand; Collaert, Nadine; Langer, Robert (2021) -
Sequential infiltration synthesis for line edge roughness mitigation of EUV resist
Baryshnikova, Marina; De Simone, Danilo; Chan, BT; Rincon Delgadillo, Paulina; Vandenberghe, Geert; Kachel, Krzysztof; Knaepen, Werner; Maes, Jan; De Roest, David (2017)