Browsing Presentations by author "Waeterloos, Joost"
Now showing items 1-3 of 3
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Characterization and process integration of a low-k spin-on dielectric
Ballantyne, Catherine; Forester, Lynn; Waeterloos, Joost (1996) -
Integration of unlanded via in a non-etchback SOG direct-on-metal approach in 0.25 micron CMOS process
Gao, Teng; Coenegrachts, Bart; Waeterloos, Joost; Beyer, Gerald; Meynen, Herman; Van Hove, Marleen; Maex, Karen (1998) -
The evaluation and the inegration of low-k organic spin-on materials in a non-etchback interconnect process
Meynen, Herman; Waeterloos, Joost; Coenegrachts, Bart; Gao, Teng; Grillaert, Joost; Van den hove, Luc (1996)