Browsing Presentations by author "Maekawa, Kaoru"
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Paths towards low-damage etching of highly porous organo-silicate low-k dielectrics
de Marneffe, Jean-Francois; Zhang, Liping; Watanabe, Mitsuhiro; yatsuda, koichi; Maekawa, Kaoru; Cooke, Mike; Goodyear, Andy; Leroy, Floriane; Tillocher, Thomas; Lefaucheux, Philippe; Dussart, Remi; Dussarat, Christian; Baklanov, Mikhaïl (2016)