Browsing Presentations by imec author "968d27ca5a622e7349851f29d50c00ca7c024c2c"
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Epitaxial growth of (Si)GeSn source-drain layers for advanced gate all around devices
Loo, Roger; Vohra, Anurag; Porret, Clément; Hikavyy, Andriy; Rosseel, Erik; Schaekers, Marc; Capogreco, Elena; Shimura, Yosuke; Kohen, David; Tolle, John; Vandervorst, Wilfried (2019) -
Gate-First High-k/Metal Gate FinFET for advanced DRAM peripheral transistors
Dupuy, Emmanuel; Capogreco, Elena; Dentoni Litta, Eugenio; Tao, Zheng; Sebaai, Farid; Spessot, Alessio; Horiguchi, Naoto (2022-09-20)