Browsing Presentations by author "Saerens, Annelies"
Now showing items 1-3 of 3
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Effect of oxide and W-CMP on the material properties and electromigration behaviour of layered aluminium metallizations
Heyvaert, Ilse; Van Hove, Marleen; Witvrouw, Ann; Maex, Karen; Saerens, Annelies; Roussel, Philippe; Bender, Hugo (1999) -
Internal stresses in aluminium interconnects
Saerens, Annelies; Van Houtte, P.; Witvrouw, Ann (1999) -
Self-annealing characterization of electroplated copper films
Lagrange, Sébastien; Brongersma, Sywert; Judelewicz, Moshe; Saerens, Annelies; Vervoort, Iwan; Richard, Emmanuel; Palmans, Roger; Maex, Karen (1999)