Browsing Presentations by imec author "bc3cb474dd21d65228e64d93fa04290a9e1a3b37"
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Limitation of EUV single exposure on DRAM applications: learning and challenges
Liu, Shih-hsiang; Dardani, Zoi; Zuurbier, Nadia; Dhagat, Parul; Wang, Erik; Fallica, Roberto (2022-06-15) -
Secondary electron distribution and photosensitivity performance of resists for extreme ultraviolet (EUV)
Rezvani, Javid; Tchoudinov, Georghii; Nannarone, Stefano; Fallica, Roberto (2022-03-17)