Browsing Presentations by imec author "c6459acb9293e7645212f63485826367fe4a859b"
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Integration of ferroelectric SrBi2Ta2O9-based capacitors beyond 0.18 CMOS technology
Johnson, J.; Goux, Ludovic; Schwitters, Michael; Paraschiv, Vasile; Maes, David; Haspeslagh, Luc; Wouters, Dirk; Caputa, Concetta; Casella, C.; Zambrano, R.; Vecchio, Emma; Monchoix, Hervé; Van Autryve, Luc; Lisoni, Judit (2003) -
Integration of MOCVD SBT stacked ferroelectric capacitors in A 0.35um CMOS technology
Maes, David; Everaert, Jean-Luc; Goux, Ludovic; Lisoni, Judit; Paraschiv, Vasile; Schuster, Thomas; Haspeslagh, Luc; Wouters, Dirk; Artoni, C.; Caputa, Concetta; Casella, P.; Corallo, G.; Russo, G.; Zambrano, R.; Monchoix, H.; Van Autryve, Luc (2004) -
Integration of SrBi2Ta2O9 (SBT) based FRAM capacitors: plasma etch issues and solutions
Paraschiv, Vasile; Boullart, Werner; Vanhaelemeersch, Serge; Lisoni, Judit; Schwitters, Michael; Maes, David; Wouters, Dirk; Casella, P.; Zambrano, R.; Vecchio, G.; Van Autryve, Luc (2004) -
Oxygen barrier for stacked SBT-FeCAP on W-plugs
Zambrano, R.; Casella, Patrizia; Corvasce, C.; Monchoix, Hervé; Van Autryve, Luc; Lisoni, Judit; Maes, David; Everaert, Jean-Luc; Johnson, Jo; Paraschiv, Vasile; Haspeslagh, Luc; Wouters, Dirk (2002) -
SrBi2Ta2O2 Patterning for feram applications: a dry -wet approach
Paraschiv, Vasile; Boullart, Werner; Vanhaelemeersch, Serge; Wouters, Dirk; Vecchio, Emma; Fragala, Maria-Elena; Van Autryve, Luc; Monchoix, Hervé; Casella, Patrizia; Zambrano, Raffaele (2003)