Publication:
Integration of MOCVD SBT stacked ferroelectric capacitors in A 0.35um CMOS technology
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1968 since deposited on 2021-10-15
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Acq. date: 2025-10-25
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Views
1968 since deposited on 2021-10-15
418item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations