Browsing Presentations by author "Yang, Jialing"

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Exploring the use of Tungsten-based Hard Masks in BEOL interconnects for 3nm node and beyond

Montero Alvarez, Daniel; Vega Gonzalez, Victor; Puliyalil, Harinarayanan; Nie, Jiuyuan; Yang, Jialing; Schleicher, Filip; Mclaughlin, Kevin; Versluijs, Janko; Lazzarino, Frederic; Park, Seongho; Tokei, Zsolt (2022-11-10)