Browsing Presentations by imec author "f712938bdd3a259e0663ea9f2d931643de8bdaf7"
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Very low temperature epitaxy of group-IV semiconductors for use in FinFET, stacked nanowires and monolithic 3D integration
Porret, Clément; Vohra, Anurag; Hikavyy, Andriy; Rosseel, Erik; Huang, Yan-Hua; Tirrito, Matteo; Kohen, David; Margetis, Joe; Tolle, John; Petersen Barbosa Lima, Lucas; Khazaka, Rami; Langer, Robert; Loo, Roger (2019)