Authors

Porret, Clément; Vohra, Anurag; Hikavyy, Andriy; Rosseel, Erik; Huang, Yan-Hua; Tirrito, Matteo; Kohen, David; Margetis, Joe; Tolle, John; Petersen Barbosa Lima, Lucas; Khazaka, Rami; Langer, Robert; Loo, Roger

Conference

Nagoya University

Title

Very low temperature epitaxy of group-IV semiconductors for use in FinFET, stacked nanowires and monolithic 3D integration

Publication type

Oral presentation