Publication:
Very low temperature epitaxy of group-IV semiconductors for use in FinFET, stacked nanowires and monolithic 3D integration
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1986 since deposited on 2021-10-27
Acq. date: 2026-02-05
Citations
Statistics
Views
1986 since deposited on 2021-10-27
Acq. date: 2026-02-05
Citations