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Very low temperature epitaxy of group-IV semiconductors for use in FinFET, stacked nanowires and monolithic 3D integration
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1986 since deposited on 2021-10-27
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Acq. date: 2026-01-05
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1986 since deposited on 2021-10-27
1last month
1last week
Acq. date: 2026-01-05
Citations