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Very low temperature epitaxy of group-IV semiconductors for use in FinFET, stacked nanowires and monolithic 3D integration
Publication:
Very low temperature epitaxy of group-IV semiconductors for use in FinFET, stacked nanowires and monolithic 3D integration
Date
2019
Presentation
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Porret, Clément
;
Vohra, Anurag
;
Hikavyy, Andriy
;
Rosseel, Erik
;
Huang, Yan-Hua
;
Tirrito, Matteo
;
Kohen, David
;
Margetis, Joe
;
Tolle, John
;
Petersen Barbosa Lima, Lucas
;
Khazaka, Rami
;
Langer, Robert
;
Loo, Roger
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1983
since deposited on 2021-10-27
Acq. date: 2025-10-25
Citations
Metrics
Views
1983
since deposited on 2021-10-27
Acq. date: 2025-10-25
Citations