Publication:
Development of sub-10-nm atomic layer deposition barriers for Cu/low-k interconnects
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1964 since deposited on 2021-10-14
Acq. date: 2025-12-08
Citations
Metrics
Views
1964 since deposited on 2021-10-14
Acq. date: 2025-12-08
Citations