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Role of hydrogen in separation of porous Si layer in late transfer process

dc.contributor.authorBilyalov, Renat
dc.contributor.authorSolanki, Chetan Singh
dc.contributor.authorPoortmans, Jef
dc.contributor.authorUlyashin, A.
dc.contributor.authorJob, R.
dc.contributor.authorFahrner, W.
dc.date.accessioned2021-10-14T21:09:37Z
dc.date.available2021-10-14T21:09:37Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6028
dc.sourceIIOimport
dc.titleRole of hydrogen in separation of porous Si layer in late transfer process
dc.typeOral presentation
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.source.peerreviewno
dc.source.conference3rd International Conference on Porous Semiconductors Science and Technology
dc.source.conferencedate11/03/2002
dc.source.conferencelocationTenerife Spain
imec.availabilityPublished - imec


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