Role of hydrogen in separation of porous Si layer in late transfer process

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Authors
Bilyalov, Renat; Solanki, Chetan Singh; Poortmans, Jef; Ulyashin, A.; Job, R.; Fahrner, W.
Conference
3rd International Conference on Porous Semiconductors Science and Technology
Title
Role of hydrogen in separation of porous Si layer in late transfer process
Publication type
Oral presentation
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