Role of hydrogen in separation of porous Si layer in late transfer process

Publication:

2002

Presentation

Author(s)

Bilyalov, Renat

;

Solanki, Chetan Singh

;

;

Ulyashin, A.

;

Job, R.

;

Fahrner, W.

1986 since deposited on 2021-10-14

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Acq. date: 2026-02-24