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Role of hydrogen in separation of porous Si layer in late transfer process
Publication:
Role of hydrogen in separation of porous Si layer in late transfer process
Date
2002
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bilyalov, Renat
;
Solanki, Chetan Singh
;
Poortmans, Jef
;
Ulyashin, A.
;
Job, R.
;
Fahrner, W.
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1982
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1982
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations