Publication:
Role of hydrogen in separation of porous Si layer in late transfer process
Date
| dc.contributor.author | Bilyalov, Renat | |
| dc.contributor.author | Solanki, Chetan Singh | |
| dc.contributor.author | Poortmans, Jef | |
| dc.contributor.author | Ulyashin, A. | |
| dc.contributor.author | Job, R. | |
| dc.contributor.author | Fahrner, W. | |
| dc.contributor.imecauthor | Poortmans, Jef | |
| dc.contributor.orcidimec | Poortmans, Jef::0000-0003-2077-2545 | |
| dc.date.accessioned | 2021-10-14T21:09:37Z | |
| dc.date.available | 2021-10-14T21:09:37Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6028 | |
| dc.source.conference | 3rd International Conference on Porous Semiconductors Science and Technology | |
| dc.source.conferencedate | 11/03/2002 | |
| dc.source.conferencelocation | Tenerife Spain | |
| dc.title | Role of hydrogen in separation of porous Si layer in late transfer process | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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