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Conference contributions
Photonic crystal waveguides in SOI fabricated with deep UV lithography
Publication:
Photonic crystal waveguides in SOI fabricated with deep UV lithography
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Date
2002
Proceedings Paper
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6640.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bogaerts, Wim
;
Wiaux, Vincent
;
Taillaert, Dirk
;
Beckx, Stephan
;
Baets, Roel
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1793
since deposited on 2021-10-14
Acq. date: 2025-12-16
Citations
Metrics
Views
1793
since deposited on 2021-10-14
Acq. date: 2025-12-16
Citations