SOI photonic crystal components fabricated with deep UV lithography

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Authors
Bogaerts, Wim; Wiaux, Vincent; Taillaert, Dirk; Beckx, Stephan; Baets, Roel
Conference
PECS-IV: International Workshop on Photonic and Electromagnetic Crystal Structures
Title
SOI photonic crystal components fabricated with deep UV lithography
Publication type
Meeting abstract
Embargo date
9999-12-31
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