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Nanoindentation on low-k dielectrics

dc.contributor.authorBrongersma, Sywert
dc.contributor.authorNolan, M.
dc.contributor.authorVervoort, Iwan
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-10-14T21:11:48Z
dc.date.available2021-10-14T21:11:48Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6070
dc.sourceIIOimport
dc.titleNanoindentation on low-k dielectrics
dc.typeOral presentation
dc.contributor.imecauthorBrongersma, Sywert
dc.contributor.imecauthorMaex, Karen
dc.contributor.orcidimecBrongersma, Sywert::0000-0002-1755-3897
dc.source.peerreviewno
dc.source.conferenceMRS Spring Meeting Symposium J: Texture and Microstructure in Electronic and Magnetic Films
dc.source.conferencedate1/04/2002
dc.source.conferencelocationSan Francisco, CA USA
imec.availabilityPublished - imec


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