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High-Q RF-inductors on low resistivity silicon through wafer post-processing

dc.contributor.authorCarchon, Geert
dc.contributor.authorDe Raedt, Walter
dc.contributor.authorBeyne, Eric
dc.date.accessioned2021-10-14T21:12:33Z
dc.date.available2021-10-14T21:12:33Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6083
dc.sourceIIOimport
dc.titleHigh-Q RF-inductors on low resistivity silicon through wafer post-processing
dc.typeProceedings paper
dc.contributor.imecauthorDe Raedt, Walter
dc.contributor.imecauthorBeyne, Eric
dc.contributor.orcidimecDe Raedt, Walter::0000-0002-7117-7976
dc.contributor.orcidimecBeyne, Eric::0000-0002-3096-050X
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.conferenceProceedings 35th International Symposium on Microelectronics - IMAPS
dc.source.conferencedate4/09/2002
dc.source.conferencelocationDenver, CO USA
imec.availabilityPublished - open access


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