Authors

Decoutere, Stefaan; Cuthbertson, Alan; Wilhelm, Rudi; Vandervorst, Wilfried; Deferm, Ludo

Conference

25th European Solid State Device Research Conference - ESSDERC

Title

Engineering of the polysilicon emitter interfacial layer using low temperature thermal re-oxidation in an LPCVD cluster tool

Publication type

Proceedings paper

Embargo date

9999-12-31