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A consistent model for the thickness dependence of intrinsic breakdown in ultra-thin oxides

dc.contributor.authorDegraeve, Robin
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorBellens, Rudi
dc.contributor.authorDepas, Michel
dc.contributor.authorMaes, Herman
dc.date.accessioned2021-09-29T13:05:34Z
dc.date.available2021-09-29T13:05:34Z
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/615
dc.sourceIIOimport
dc.titleA consistent model for the thickness dependence of intrinsic breakdown in ultra-thin oxides
dc.typeProceedings paper
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorGroeseneken, Guido
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage863
dc.source.endpage866
dc.source.conferenceInternational Electron Devices Meeting. Technical Digest
dc.source.conferencedate10/12/1995
dc.source.conferencelocationWashington, DC USA
imec.availabilityPublished - open access


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