A consistent model for the thickness dependence of intrinsic breakdown in ultra-thin oxides

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Authors
Degraeve, Robin; Groeseneken, Guido; Bellens, Rudi; Depas, Michel; Maes, Herman
Conference
International Electron Devices Meeting. Technical Digest
Title
A consistent model for the thickness dependence of intrinsic breakdown in ultra-thin oxides
Publication type
Proceedings paper
Embargo date
9999-12-31
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