A consistent model for the thickness dependence of intrinsic breakdown in ultra-thin oxides

dc.contributor.author	Degraeve, Robin
dc.contributor.author	Groeseneken, Guido
dc.contributor.author	Bellens, Rudi
dc.contributor.author	Depas, Michel
dc.contributor.author	Maes, Herman
dc.contributor.imecauthor	Degraeve, Robin
dc.contributor.imecauthor	Groeseneken, Guido
dc.date.accessioned	2021-09-29T13:05:34Z
dc.date.available	2021-09-29T13:05:34Z
dc.date.embargo	9999-12-31
dc.date.issued	1995
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/615
dc.source.beginpage	863
dc.source.conference	International Electron Devices Meeting. Technical Digest
dc.source.conferencedate	10/12/1995
dc.source.conferencelocation	Washington, DC USA
dc.source.endpage	866
dc.title	A consistent model for the thickness dependence of intrinsic breakdown in ultra-thin oxides
dc.type	Proceedings paper
dspace.entity.type	Publication
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