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RBS Analysis of Artefacts Induced by Low Energy Ion Sputtering

dc.contributor.authorBrijs, Bert
dc.contributor.authorDe Coster, Walter
dc.contributor.authorBender, Hugo
dc.contributor.authorStorm, Wolfgang
dc.contributor.authorOsiceanu, Petre
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-09-29T12:39:58Z
dc.date.available2021-09-29T12:39:58Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/61
dc.sourceIIOimport
dc.titleRBS Analysis of Artefacts Induced by Low Energy Ion Sputtering
dc.typeOral presentation
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorVandervorst, Wilfried
dc.source.peerreviewno
dc.source.conference13th International Conference on the Application of Accelerators in Research and Industry; November 7-10, 1994; Denton, Texas, U
imec.availabilityPublished - imec


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