dc.contributor.author | De Pauw, Herbert | |
dc.contributor.author | De Baets, Johan | |
dc.contributor.author | Vanfleteren, Jan | |
dc.contributor.author | Van Calster, Andre | |
dc.date.accessioned | 2021-10-14T21:23:40Z | |
dc.date.available | 2021-10-14T21:23:40Z | |
dc.date.issued | 2002 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6210 | |
dc.source | IIOimport | |
dc.title | An O/E measurement probe based on an optics-extended MCM-D motherboard technology | |
dc.type | Proceedings paper | |
dc.contributor.imecauthor | De Pauw, Herbert | |
dc.contributor.imecauthor | De Baets, Johan | |
dc.contributor.imecauthor | Vanfleteren, Jan | |
dc.contributor.imecauthor | Van Calster, Andre | |
dc.contributor.orcidimec | Vanfleteren, Jan::0000-0002-9654-7304 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.source.beginpage | 936 | |
dc.source.endpage | 941 | |
dc.source.conference | Proceedings 35th International Symposium on Microelectronics - IMAPS | |
dc.source.conferencedate | 4/09/2002 | |
dc.source.conferencelocation | Denver, CO USA | |
imec.availability | Published - open access | |