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Reliability and failure analysis of RF MEMS switches

dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorvan Spengen, Merlijn
dc.contributor.authorModlinski, Robert
dc.contributor.authorJourdain, Anne
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorFiorini, Paolo
dc.contributor.authorTilmans, Harrie
dc.date.accessioned2021-10-14T21:25:58Z
dc.date.available2021-10-14T21:25:58Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6231
dc.sourceIIOimport
dc.titleReliability and failure analysis of RF MEMS switches
dc.typeProceedings paper
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorJourdain, Anne
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage275
dc.source.endpage281
dc.source.conferenceProceedings 28th International Symposium for Testing and Failure Analysis - ISTFA
dc.source.conferencedate7/11/2002
dc.source.conferencelocationPhoenix, AZ USA
imec.availabilityPublished - open access


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