Formation of CoSi2 on strained Si0.8Ge0.2 using a sacrificial Si layer

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Authors
Alves Donaton, Ricardo; Kolodinski, Sabine; Caymax, Matty; Roussel, Philippe; Bender, Hugo; Brijs, Bert; Maex, Karen
Journal
Applied Surface Science
Volume
91
Title
Formation of CoSi2 on strained Si0.8Ge0.2 using a sacrificial Si layer
Publication type
Journal article
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