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Nondestructive stiffness and density characterization of porous low-K films by surface acoustic wave spectroscopy

dc.contributor.authorFlannery, C. M.
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-14T21:37:28Z
dc.date.available2021-10-14T21:37:28Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6323
dc.sourceIIOimport
dc.titleNondestructive stiffness and density characterization of porous low-K films by surface acoustic wave spectroscopy
dc.typeProceedings paper
dc.source.peerreviewno
dc.source.beginpage233
dc.source.endpage235
dc.source.conferenceProceedings of the IEEE International Interconnect Technology Conference
dc.source.conferencedate3/06/2002
dc.source.conferencelocationBurlingame, CA USA
imec.availabilityPublished - imec


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