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Radiation damage in deep submicron MOSFETs by high-temperature electron irradiation

dc.contributor.authorHayama, K.
dc.contributor.authorOhyama, H.
dc.contributor.authorTakakura, K.
dc.contributor.authorSimoen, Eddy
dc.contributor.authorPoyai, Amporn
dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-10-14T21:45:21Z
dc.date.available2021-10-14T21:45:21Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6377
dc.sourceIIOimport
dc.titleRadiation damage in deep submicron MOSFETs by high-temperature electron irradiation
dc.typeOral presentation
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.source.peerreviewno
dc.source.conference21st Electronic Materials Symposium
dc.source.conferencedate24/06/2002
dc.source.conferencelocationIzu-Nagaoka Japan
imec.availabilityPublished - imec


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