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Issues, achievements and challenges towards intergration of high-k dielectrics
Publication:
Issues, achievements and challenges towards intergration of high-k dielectrics
Date
2002
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Heyns, Marc
;
Bender, Hugo
;
Caymax, Matty
;
Carter, R
;
Claes, Martine
;
Conard, Thierry
;
Boullart, Werner
;
De Gendt, Stefan
;
Degraeve, Robin
;
Deweerd, Wim
;
Groeseneken, Guido
;
Houssa, Michel
;
Kubicek, Stefan
;
Lujan, Guilherme
;
Nohira, H.
;
Pantisano, Luigi
;
Petry, Jasmine
;
Röhr, Erika
;
Vandervorst, Wilfried
;
Van Elshocht, Sven
;
Xu, Zhen
;
Zhao, Chao
;
Cartier, E.
;
Chen, J.
;
Cosnier, V.
;
Green, M.
;
Jang, S.E.
;
Kaushik, Vidya
;
Kerber, A.
;
Kluth, J.
;
Lin, S.
;
Tsai, Wilman
;
Young, Edward
;
Manabe, Y.
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2127
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
2127
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations