Show simple item record

Issues, achievements and challenges towards intergration of high-k dielectrics

dc.contributor.authorHeyns, Marc
dc.contributor.authorBender, Hugo
dc.contributor.authorCaymax, Matty
dc.contributor.authorCarter, R
dc.contributor.authorClaes, Martine
dc.contributor.authorConard, Thierry
dc.contributor.authorBoullart, Werner
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorDegraeve, Robin
dc.contributor.authorDeweerd, Wim
dc.contributor.authorGroeseneken, Guido
dc.contributor.authorHoussa, Michel
dc.contributor.authorKubicek, Stefan
dc.contributor.authorLujan, Guilherme
dc.contributor.authorNohira, H.
dc.contributor.authorPantisano, Luigi
dc.contributor.authorPetry, Jasmine
dc.contributor.authorRöhr, Erika
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorXu, Zhen
dc.contributor.authorZhao, Chao
dc.contributor.authorCartier, E.
dc.contributor.authorChen, J.
dc.contributor.authorCosnier, V.
dc.contributor.authorGreen, M.
dc.contributor.authorJang, S.E.
dc.contributor.authorKaushik, Vidya
dc.contributor.authorKerber, A.
dc.contributor.authorKluth, J.
dc.contributor.authorLin, S.
dc.contributor.authorTsai, Wilman
dc.contributor.authorYoung, Edward
dc.contributor.authorManabe, Y.
dc.date.accessioned2021-10-14T21:47:12Z
dc.date.available2021-10-14T21:47:12Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6389
dc.sourceIIOimport
dc.titleIssues, achievements and challenges towards intergration of high-k dielectrics
dc.typeProceedings paper
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorBender, Hugo
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorClaes, Martine
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorBoullart, Werner
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorGroeseneken, Guido
dc.contributor.imecauthorHoussa, Michel
dc.contributor.imecauthorKubicek, Stefan
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecBoullart, Werner::0000-0001-7614-2097
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.contributor.orcidimecHoussa, Michel::0000-0003-1844-3515
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.source.peerreviewno
dc.source.conference5th International Forum on Semiconductor Technology - IFST
dc.source.conferencedate21/02/2002
dc.source.conferencelocationYokomama Japan
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record